Precesion Optics - VTC-PO Series > Product

VTC-PO Series

Concept : Batch Type Vacuum Evaporation System for precision optics

- Hardware Specfication -
Available Chamber Size, diameter : 900mm, 1,000mm, 1,200mm and 1,350mm
    * Other chamber sizes are available on customer's request
Number of E-beam Evaporatin Source : 2
Power of E-beam Evaporation Source : 5kW
    * 6kW and 10kW is available on customer's request
Ion Beam Source : End-hall type with hot cathode
    * Gridded or Gridless RF Ion Beam Source is available on customer's request
Thermal Evaporation Source : Boat with shutter, water cooled electrodes
Lens Holder : Dome type single rotation holder, divided into 3 or 4 segments
    * Angled or non-angled planetary rotation holder is available on customer's request
Pumping System : Turbo molecular pump with rotary vane pump
    * Oil diffusion pump or Cryogenic pump is available on customer's request
Water Vapor Pump : CRYO-6 with cold trap
Heating Temperature : Up to 350C
Thickness Monitoring : Quartz multi sensor head
Optical Monitoring : Reflection or transmission mode with test glass changer
    * Available wavelength range is 220nm~2,200nm
Process Gas : Argon and oxygen, supplied through mass flow controller
    * Other gases are available on customer's request
System Control : Fully automatic control
Required Installation Space : Depends on the chamber size

* Please send your inquiry to vac-tec@vac-tec.co.kr if you need more details