Precesion Optics - ERIDAN
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작성자최고관리자 댓글 0건 조회 73회 작성일 25-03-19 11:13본문
ERIDAN
Concept : Compact magnetron sputtering tool with load lock chamber
- Hardware Specification -
Chamber Size, diameter : 1,300mm
* Other chamber sizes are available on customer's request
Cartridge Type Load Lock Chamber with Automatic Handling Robot
Magnetron Cathode : Dual rotatble with shutter
* Dual planer is available on customer's request
* Number of magnetron chathode is up to customer's request
Sputtering Mode : Reactive, Non-Reactive and Metal mode
Number of Coating Layer : More than 200 layers
RF Plasma Source with shutter
Substrate Holder : Planetary rotation holder
Available Substrate Size : Up to 200mm diameter
Pumping System : Turbo molecular pump with dry pump
* Cryogenic pump is available on customer's request
Heating Temperature : Up to 350C
Optical Monitoring System : Broad band monitoring
* Available wavelength range is 220nm~2,200nm
System Control : Fully automatic control
* Please send your inquiry to vac-tec@vac-tec.co.kr if you need more details