(F)PCB
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작성자최고관리자 댓글 0건 조회 93회 작성일 25-03-19 10:46본문
In-Line Low Temperature Sputter System
In-Line Low Temperature Sputter System is designed for sputtering of a few microns thickness metal layers on micron thickness flexible printed circuit board with managing temperature of thin flexible printed circuit board less than 150C during whole process.
- Hardware Specification -
Chamber : Modular design, vertically or horizontally oriented
Substrate Size : Up to customer's request
Number of Magnetron Cathode : Up to customer's request
Type of Magnetron Cathode : Single Planer, Dual Planer, Single Rotatble and Dual Rotatble are available
Sputtering Mode : Low Temperature Reactive and Non-Reactive
Pre-treatment Source : Ion Beam Source and/or RF Plasma Source are available
Transportation System : Carrier transportation with Carrier Return Line
Pumping System : Turbo molecular pump with dry pump
* Cryogenic pump or combination of cryogenic pump and turbo molecular pump is available
System Contorl : Fully automatic control
* Please send your inquiry to vac-tec@vac-tec.co.kr if you need more details
