Optics - VTC-1350
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작성자최고관리자 댓글 0건 조회 66회 작성일 25-03-19 10:49본문
VTC-1350
Concept : Batch Type Vacuum Evaporation System
Batch Capacity : Approx. 220pcs of 70mm diameter lens
Process Time : Approx. 35mins, depends on process conditions
Available Coating Process : Anti-Reflection, Anti-Static, Reflection(Mirror) and etc.
* hydro- and super hydro phobic top coat are available
- Hardware Specfication -
Chamber Size : 1,350mm diameter
E-beam Evaporatin Source : 6 pockets of 25cc each
Ion Beam Source : End-hall type with hot cathode
Thermal Evaporation Source : Boat
Lens Holder : Dome type single rotation holder, divided into 3 segments
* 4 segments is available on customer's request
Vacuum Pump : Turbo molecular pump with rotary vane pump
* Oil diffusion pump or Cryogenic pump is available on customer's request
Water Vapor Pump : CRYO-6 with cold trap
Heating Temperature : Up to 150C
Thickness Monitoring : Quartz single sensor head
Process Gas : Argon and oxygen, supplied through mass flow controller
* Other gases are available on customer's request
System Control : Fully automatic control
Required Installation Space : 5,000(W)mm * 3,800(D)mm * 3,000(H)mm, including maintenance space
* Please send your inquiry to vac-tec@vac-tec.co.kr if you need more details
