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Ion Beam Etching
E-Beam Evaporation
Thermal Evaporation
Magnetron Sputtering
Ion Beam Sputtering
Ion Beam Etching
E-beam Welding
MBE
UHV
CVD
Cluster
Simulation Chamber
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OPM(Optical Monitor)
Ion Beam Etching
Ion Beam Etching
컨셉 : RF 이온 빔 에칭(RF Lock 챔버 포함)
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